Integration of GaAs waveguides on a silicon substrate for quantum photonic circuits
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- oe-30-21-37595
Final published version, 5.73 MB, PDF document
We report a method for integrating GaAswaveguide circuits containing self-assembled quantum dots on a Si/SiO2 wafer, using die-to-wafer bonding. The large refractive-index contrast between GaAs and SiO2 enables fabricating single-mode waveguides without compromising the photon-emitter coupling. Anti-bunched emission from individual quantum dots is observed, along with a waveguide propagation loss
| Original language | English |
|---|---|
| Journal | Optics Express |
| Volume | 30 |
| Issue number | 21 |
| Pages (from-to) | 37595-37602 |
| Number of pages | 8 |
| ISSN | 1094-4087 |
| DOIs | |
| Publication status | Published - 10 Oct 2022 |
- PLATFORM, CHIP, DIE
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